Pengaruh Suhu Annealing Terhadap Mikrostruktur Dan Morfologi Lapisan Tipis Ba…

ABSTRAK Ferroelectric is a dielectric material which has the ability to change a wide internal electrical polarization using a suitable electric field. Ferroelectric materials can be applied as capacitors and made in thin films. Barium titanate is a ferroelectric material and can be doped with zirconium which increases the dielectric constant of the material. Fabrication of Barium Zirconiun Ti…