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Pembuatan Dan Karakterisasi Kapasitor Ba0,4Sr0,6TiO3 DENGAN Menggunakan Metode Sol-Gel
A Barium Strotium Titanat (BST) capasitor in Ba0,4Sr0,6Tio3 composition using sol-gel method and annealing at temperature 600oC and 650oC to get cristalin has been created. This capasitor characterized using Energy Dispersive X-ray (EDX), Field Emission Scanning Microscopy (FESEM) and impedance spectroscopy instrument. Results of characterization using FESEM obtained thickness of the capasitor Ba0,4Sr0,6Tio3 at 650oC temperature measuring167,5 nm and at a temperature of 600oC is 78,19 nm. The result of characterization using EDX that grown on glass substrate at annealing temperature 600 oC is obtained Ba atomic number of 0,3% and by weight of 2,0%, Sr number of 1,0% and the weight of 3,9% and Ti 1.1% by weight of 2.4 % and at annealing temperature 650 oC is obtained Ba atomic number of 0,4% by weight of 2,7%, Sr of 0.7 % by weight of 3.0%Ti 0.8% by weight of 1.9 %. Characterization results using impedance spectroscopy show the electrical properties of capasitors is obtained value Ba0,4Sr0,6Tio3 frequency, real impedance (Z’) and the imaginary impedance electrical properties and dielectric region between the contact with the sample. The capacitance value in the annealing temperature of 650oC and 600oC at a frequency of 100 Hz respectively is 2,11 x 10-7 F and 2,77 x 10-8 F, value of the dielectric constant at 650oC and 600oC annealing temperature at a frequency of 100 Hz respectively 23,5 and 1,44.
Keyword : Barium Strotium Titanat, Sol-Gel method, EDX, FESEM, impedance spectroscopy
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