CD Skripsi
Pembuatan Dan Karakterisasi Kapasitor Barium Strontium Titanat (BST) Dengan Spektroskopi Impedansi
ABSTRACT
Barium Strontium Titanate (BST) thin films research has been conducted with composition Ba0,15Sr0,85TiO3 using sol gel method and annealed at temperature of 600oC and 650oC. The BST thin films were characterized using Field Emission Scanning Electron Microscopy (FESEM) and Impedance Spectroscopy. The results of FESEM characterization such as the size of particle for samples with temperatures of 600oC and 650oC were 64.75 nm and 84.8 nm respectively. The result of Spectroscopic Characterization of impedance given the frequency value, obtained by real impedance and imaginary impedance. Capacitance values at 100Hz frequencies of BST thin films at 600°C and 650°C respectively are 5,2×10-11 Farad and 2,6×10-11 Farad. The dielectric constant values of BST thin films at temperatures of 600oC and 650oC are respectively 5.84 and 13.4.
Keywords: Barium Stontium Titanate, FESEM and Impedance Spectroscopy
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