CD Skripsi
Karakterisasi Film Tipis Bazr0,35ti0,65o3 Menggunakan X-Ray Diffraction Dengan Variasi Suhu 600 Dan 650
Barium titanate (BaTiO3) is a basic ferroelectric component material which made
in the form of a thin film. Barium Titanate is doped with Zr and made a thin film
(BaZr0.35Ti0.65O3). BZT is the main material that is most interesting to be studied
because it has a high dielectric constant. This thin film was used the sol-gel
method and deposited by spin coating on to glass substrate that assisted with
speed of 3000 rpm for 30 seconds. The growth of this thin film was made by
variying annealing temperature of 600 and 650 for 1 hour. The
BaZr0,35Ti0,65O3 was anlyzed using X-Ray Diffraction (XRD) method the crystal
structure, lattice parameters and the crystallite size of the sample was determined
using Scherrer formula. The crystallite size of the sample is affected by the
annealing temperature. Moreover, the X-Ray Diffraction results show that the
crystal structure of the sample is tetragonal, that has a lattice parameters of a = b
that is 4.00 angstroms and c is 4.05 angstroms and obtains crystal size by
temperature of 600 is 50.60 nm, 63.70 nm, 52.65 nm, 54.24 nm and by
temperature of 650 that is 67.47 nm, 103.2 nm, 70.21 nm, 72.31 nm.
Keywords: BaZr0.35Ti0.65O3, Sol-gel Method, Annealing, X-Ray Diffraction.
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