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Pembuatan Film Tipis Barium Strontium Titanat (Ba0,6Sr0,4TiO3) Menggunakan Metode Sol-Gel Dan Karakterisasi Menggunakan Spektroskopi Impedansi
Fabrication of thin film from material barium strontium titanat (Ba0,6Sr 0,4TiO3) that is annealing at a temperature of 6000C and 650°C has been carried out. Samples are made by using the sol-gel method, then characterized by using Field Emission Scanning Microscopy (FESEM) and Impedance Spectroscopy. Results of FESEM for samples at temperature 6000C and 650°C have thickness of 102,7 nm and 245,7 nm. The impedance spectroscopy characterization uses frequency at 100 Hz up to 1 MHz to get real impedance value and imaginer value for determining complex impedance, complex capacitance, dielectric constant. The complex impedance values for both temperature 600°C and 650°C is 2061,4 Ω dan 4684,3 Ω. The complex capacitance values for both temperature of 6000C and 650°C are 7,72x10-7 Farad and 3,4x10-7 Farad. The value of the relative dielectric constant at temperature of 6000C and 650°C are 52,9 and 55,6 respectively.
Keywords : Characterization, Thin Film, Ba0,6Sr 0,4TiO3, Sol-Gel Method, Impedance Spectroscopy
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