Penggunaan Pemodelan Sumber Plasma Helium Pada Keadaan Setimbang Untuk Aplika…

Helium plasma source modeling was performed in order to obtain species density at balanced conditions under pressure of 1 atm. The software used in this modeling is matrix laboratory software (MATLAB). The equation used is a continuity equation that depends on the position and parameters of Arrhenius. Plasma temperatures used were 0.1 eV, 0.2 eV, 0.3 eV, and 0.5 eV. Species involved in pla…