CD Skripsi
Karakterisasi Difraksi Sinar X Pada Pembuatan Film Tipis Barium Zirkonium Titanate Bazrxti(1-X)O3 Dengan Menggunakan Metode Sol-Gel
ABSTRACT
Barium Titanate (BaTiO3) is a ferroelectric material that has a high dielectric
constant value, which can be made in the form of a thin layer. A thin layer of Barium
Titanate (BaTiO3) doped with Zr to form Ba (ZrxTi1-x) O3 was successfully
prepared using sol gel method with the composition of x = 0.2 and x = 0.4. A thin
layer was created on the glass substrate using a spin coating for 30 seconds at a speed
of 3000rpm. BZT was annealed with temperature variations of 600oC and 650oC and
characterized using X-Ray Diffractometer (XRD) to determine lattice parameters,
crystalline structure, and crystalline size using the Scherrer formula. Based on the
analysis, the thin layer has a tetragonal crystalline structure with the lattice
parameters value for the composition x = 0.2 is a = b = 4.02 Å and c = 4.06 Å, the
composition x = 0.4 is a = b = 4, 06 Å and c = 4.10Å. The crystal size for x = 0.2;0.4
with a temperature of 600oC and 650oC are 33,84 nm, 45,05 nm, 50,66 nm, dan 67,54
nm respectively.
Keywords: Barium Zirconium Titanate, Sol Gel Method, Annealing, XRD
Characterization.
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