CD Skripsi
Fabrikasi Film Tipis Barium Zirkonium Titanat Bazrxti(1-X)O3 Menggunakan Metode Sol Gel Dengan Karakterisasi Difraksi Sinar X
A thin film of Barium Titanate (BaTiO3) was doped by Barium Zirconat (BaZrO3)
that produced the film in the form of BaZrxTi1-xO3 or BZT. This material has a
high dielectrict constant. The BZT thin films were prepared with a composition
variation x=0,7 and x=0,75 using sol-gel method. These samples were annealed at
temperature of 600°C and 650°C for an hour. The thin films of BZT were
characterized using X-Ray Diffractometer XRD to observed crystal structure,
lattice parameter and crystallite size using Scherrer formula. The crystallite size
increases as annealing temperature increases that followed by increasing intensity.
The result shows crystal structure is tetragonal with a=b = 3.90 Å and c = 3.95 Å
lattice parameter for x=0.7 composition, and a=b =3.85 Å and c =3.90 Å for
x=0.75 composition. The crystal size for x=0.7 and x=0.75 compositions on
600°C and 650°C, respectively are 26. 17 nm, 27. 97 nm, 28.95 nm, and 31.06
nm.
Keyword: BZT, Sol-Gel Method, Annealing, XRD, crystal structure, crystal size.
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