CD Skripsi
Pengaruh Variasi Komposisi Dan Temperatur Annealing Pada Pembuatan Film Tipis Barium Zirkonium Titanate Dengan Menggunakan Metode Sol-Gel
A thin film of Barium Zirconium Titanate fabricated with sol-gel method with
composition of x= 0.80 and x= 0.85 was annealed with temperature variation of
550°C, 600°C and 650° C for 1 hour. Barium Zirconium Titanate thin films were
characterized using X-Ray Diffraction (XRD) method. Based on the XRD pattern,
the lattice parameters, crystal structure, and crystal size can be determined. Crystal
size was calculated based on diffraction pattern using the Scherrer formula. The
result shows that annealing temperature affects the crystal size of the samples. The
value of lattice parameters of a = b for composition x = 0.80 is 3.74 Å and for the
value of c is 3.91 Å, while for composition x = 0.85 shows the value of a = b is 3.72
Å and for the value of c of 3,88 Å. This result shows the crystal structure of BZT is
tetragonal since the value of the lattice parameter were a=b c. The crystal size for
x = 0.8;0.85 with a temperature of 550°C, 600°C and 650°C are 22,56 nm, 29,02
nm, 32,49 nm, 20,83 nm, 21,95 nm and 23,21 nm respectively.
Keywords: Barium Zirconium Titanate, Sol Gel Method, Annealing, XRD
Characterization.
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