The thin film of Barium Strontium Titanate (BST) has been studied with composition of by using sol-gel method that annealed in temperature of 600oC and 650oC. The thin film of BST is characterized by using Field Emission Scanning Electron Microscopy (FESEM) and an impedance spectroscopy. The result samples in temperature of 600oC and 650oC are 46 nm and 141 nm in thickness respectively. The res…