CD Skripsi
Pengaruh Suhu Annealing Terhadap Mikrostruktur Dan Morfologi Lapisan Tipis Bazr0.45TI0.55O3 Yang Ditumbuhkan Dengan Metode Sol-Gel
ABSTRAK
Ferroelectric is a dielectric material which has the ability to change a wide internal electrical polarization using a suitable electric field. Ferroelectric materials can be applied as capacitors and made in thin films. Barium titanate is a ferroelectric material and can be doped with zirconium which increases the dielectric constant of the material. Fabrication of Barium Zirconiun Titanate thin film with the composition (BaZr0.45Ti0.55O3) has been successfully prepared using the sol-gel method. The films were Annealed at 600℃ and 650 ℃ with a holding time of 1 hour and were characterized using XRD and SEM. The XRD characterization results obtained lattice parameters a = b = 3.97 Å and c = 4.25Å showed that the structure of the crystal is the tetragonal. The crystallinity level become higher with increasing annealing temperature that is indicated by greater intensity. SEM characterization showed that the annealing temperature was 600 ℃, the grain size was not clearly visible so that the grain size could not be determined. At 650 ℃ the grain size can be determined.
Keyword : BaZr0,45Ti0,55O3, sol-gel method, annealing, crystal structure, grain size.
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