ABSTRACT Barium Strontium Titanate (BST) thin films research has been conducted with composition Ba0,15Sr0,85TiO3 using sol gel method and annealed at temperature of 600oC and 650oC. The BST thin films were characterized using Field Emission Scanning Electron Microscopy (FESEM) and Impedance Spectroscopy. The results of FESEM characterization such as the size of particle for samples with…