Fabrication of thin film from material barium strontium titanat (Ba0,6Sr 0,4TiO3) that is annealing at a temperature of 6000C and 650°C has been carried out. Samples are made by using the sol-gel method, then characterized by using Field Emission Scanning Microscopy (FESEM) and Impedance Spectroscopy. Results of FESEM for samples at temperature 6000C and 650°C have thickness of 102,7 nm and 2…