Pengaruh Variasi Komposisi Dan Temperatur Annealing Pada Pembuatan Film Tipis…

A thin film of Barium Zirconium Titanate fabricated with sol-gel method with composition of x= 0.80 and x= 0.85 was annealed with temperature variation of 550°C, 600°C and 650° C for 1 hour. Barium Zirconium Titanate thin films were characterized using X-Ray Diffraction (XRD) method. Based on the XRD pattern, the lattice parameters, crystal structure, and crystal size can be determined. …