CD Skripsi
Pembuatan Dan Karakterisasi Film Tipis Barium Strontium Titanat Ba0,7Sr0,3tio3 (BST) Menggunakan Spektroskopi Impedansi
The thin film of Barium Strontium Titanate (BST) has been studied with composition of by using sol-gel method that annealed in temperature of 600oC and 650oC. The thin film of BST is characterized by using Field Emission Scanning Electron Microscopy (FESEM) and an impedance spectroscopy. The result samples in temperature of 600oC and 650oC are 46 nm and 141 nm in thickness respectively. The result of impedance spectroscopy characterization given frequency values obtained by the impedance value of real and imaginary. The capacitance of the thin film of BST in temperature of 600oC and 650oC are 75,46 F dan 154,69 F. The dielectric constant of the thin film of BST in temperature of 600oC and 650oC are 23,98 dan 148,40 respectively.
Keywords : , FESEM, Impedance Spectroscopy
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