This paper investigates a structure capasitors of Barium Strontium Titanate (BST) with composition of Ba0,5Sr0,5TiO3 by using sol-gel method that has been annealing at temperature of 600°C and 650°C. Structure capasitors of BST was characterized by using Field Emission Scanning Electron Microscopy (FESEM) and Impedance Spectroscopy. The characterization results by using FESEM the thickness of…