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Fabrikasi Dan Karakterisasi Lapisan Tipis Bahan Feroelektrik
Thin films of (0.9)BaTiO3-(0.1)BaZr0.5Ti0.5O3 (BT-BZT) is ferroelectric materials developed to meet the specifications for multilayer ceramic capacitors (MLCC). This study aims to analyze the optical properties, crystal structure, morphological structure, and dielectric properties of BT-BZT using Ultraviolet-Visible (UV-Vis) spectroscopy, X-Ray Diffraction (XRD), Field Emission Scanning Electron Microscopy (FESEM), and Impedance Spectroscopy. The study uses the sol gel method on Fluorine-Doped Tin Oxide (FTO) substrate, then annealed at temperatures of 700°C, 750°C, and 800°C for 1 hour. The UV-Vis characterization results indicate that the band gap energies for the samples annealed at 700°C, 750°C, and 800°C are 2.90 eV, 2.79 eV, and 2.57 eV, respectively. XRD analysis shows that the crystal size for the sample annealed at 750°C is 375.56 Å, with no crystalline structure observed for samples annealed at 700°C and 800°C. The morphology of the BT-BZT samples reveals irregular spherical shapes with particle sizes of 237 ± 55, 300 ± 62, and 405 ± 71. The capacitance values of the samples at
a frequency of 1 MHz are 8.22 x 104 F, 8.77 x 104 F, and 8.91 x 104 F, while the
dielectric constant values at 1 MHz are 3524.62, 3589.69, and 3647.34, with
dielectric loss values at 1 MHz of 0.054, 0.068, and 0.070. The capacitance, dielectric constant, and dielectric loss values obtained indicate that the samples is suitable for uses as dielectric materials for MLCC.
Keywords: Thin film BT-BZT; Sol-gel method; Dielectric constant; MLCC capacitor
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