CD Skripsi

Analisa Variasi Waktu Tahan Proses Annealing Film Tipis Barium Zirkonium Titanat Bazr0,5ti0,5o3 Dengan Menggunakan Karakterisasi Scanning Electron Microscopy (Sem)

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Barium Titanate (BaTiO3) is a ferroelectric material which has a high dielectric
constant. Barium Titanate can be doped with Zr which forms a thin BaZr0.5Ti0.5O3
layer. The thin layer of Barium Zirconium Titanate (BZT) has been successfully
fabricated on an FTO substrate using sol-gel method and growing with spin
coating. The thin films were annealed at 700oC for 30, 60, 90 and 120 minutes.
Characterization of the thin films was carried out using Scanning Electron
Microscopy (SEM) to determine their grain size and thickness. The results of
SEM photographs analysis showed that the average grain sizes for annealing
times of 30; 60; 90; and 120 minutes, respectively, is 130.181 ± 36.117 nm; 185.918
± 58.303; 240.414 ± 73.750 nm; and 256.765 ± 64.569 nm and the average thicknesses is
597.241 ± 89.967 nm, 565.975 ± 77.626 nm, 513.537 ± 69.534 nm; and 440.076 ± 65.576
nm. The data obtained indicate that the grain size of the BZT layer increases with
the widening of the grain diameter due to the diffusion process. The BZT
elements are more compressed and the solvent that is still trapped is reduced due
to the longer holding time in the annealing process, causing the reduction of the
layer thickness.
Keywords: Barium Zirconium Titanate, grain size, holding time, sol-gel method,
thin layer

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Ketersediaan

Informasi Detail

Judul Seri

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No. Panggil

03 01.122 (0003)

Penerbit

Pekanbaru : Universitas Riau – FMIPA – FISIKA., 2022

Deskripsi Fisik

xiii, 35 hlm.: ill.: 29 cm

Bahasa

Indonesia

ISBN/ISSN

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Klasifikasi

03 01.122 (0003)

Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

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Subjek

FISIKA

Info Detail Spesifik

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Pernyataan Tanggungjawab

ELFITRA

Versi lain/terkait

Lampiran Berkas

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